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FEI Helios Dualbeam Nanolab 650

The instrument is equipped with an Elstar field emission SEM for nanometer resolution imaging and a Tomahawk FIB column operating from 30kV down to 500V. Ion currents range from 7pA, providing a minimal beam size of 7nm, to 22nA which can be used for substantial milling tasks. The very stable piezo-driven stage can operate on an area of 150 x 150 mm.

Attached are currently a gas source for platinum deposition as well an Omniprobe manipulator that is typically used for transfer of TEM and APT samples.


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