This microscope is equipped with a LaB6 emitter and S-twin lens for higher resolution at 200kV. Also an Oxford electron dispersive X-ray spectroscopy (EDS) system is attached for chemical analysis, and a Gatan UltraScan 1000P CCD camera for image recording (2kx2k).
Point resolution 0.24 nm; Line res. 0.14 nm; Cs = 1.2 mm; Cc = 1.2 mm.
Specimen holders: (1) Single tilt holder ±40°; (2) Double tilt holder (x ±40°, y ±40°).