With a field emission gun (FEG), this microscope is designed for both high resolution TEM/STEM and analytical microscopy. The attachments of this microscope are: (1) A scanning unit with a high-angle annular dark-field (HAADF) detector for scanning TEM (Z-contrast imaging); (2) Gatan Enfina 1000 system for electron energy-loss spectroscopy (EELS); (3) Electron dispersive X-ray analysis system (EDXA) for chemical information; (4) Gatan wide-angle CCD (2kx2k) for image recording.
The energy spread is 0.7 eV; Point resolution 0.2nm; information limit <0.1 nm; HR-STEM res. 0.136 nm.
Specimen holder: Double tilt holder (x ±22°, y ±15°).