These SPMs have the similar functions in surface measurements with the Milti-Mode microscope as stated above. The major difference is that this microscope is designed for imaging a 6" wafer. A large specimen stage is provided and the microscope is located in an anti-vibration hood. Inside the microscope, there is an optical system by the scanner to guide the scan with an image of the sample surface shown on the screen. With this optical image, users can search a specific feature as small as 0.1µm to scan. The hardware design of this microscope is compatible with electric force and magnetic force microscopy without any additional attachments.