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Intern: Juan Chavez, UC Irvine Mentor: Garrett Cole Faculty Supervisor: Noel MacDonald Department: Materials and Mechanical Engineering

MICRO-MECHANICAL VOLTAGE CONTROLLED TUNABLE FILTERS FORMED IN GAAS

Tunable optical filters are vital components for various applications, such as optical sensing and dense wavelength division multiplexed optical networks. GaAs MOEMS are desired because of their enhanced electrical properties, wide tuning range, robust design, and high yield. The device structure consists of a fixed GaAs/Al0.98Ga0.02As distributed Bragg Reflector (DBR) stack and a suspended GaAs/Al0.98Ga0.02As DBR stack that are separated by an air gap. This single Fabry-Perot cavity has its entering wavelength changed as the suspended DBR actuates with an applied voltage. More efficient tuning is reached with an increasing number of DBR layers within each stack. Careful characterization must be practiced to define an accurate relationship between the voltage applied and the displacement of the actuating DBR stack. Numerous computer models are required to troubleshoot possible modal problems, buckling, and ohmic conductivity.

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